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Laser Decap
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Laser Decap

Laser Decap

Regular laser access today:
  1. Generate a cavity (pocket) in EMC (100µm to 200µm remaining EMC above chip).
  2. Opening is finished with a final acid etch (wet) or with plasma (dry).
    – 1064nm wavelength (NIR)
    – Frequency 1.6 – 1MHz
    – Pulse length 4 ~ 200 ns

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