Laser Decap

Regular laser access today:

1. Generate a cavity (pocket) in EMC (100µm to 200µm remaining EMC above chip).
   
2. Opening is finished with a final acid etch (wet) or with plasma (dry).
   – 1064nm wavelength (NIR)
   – Frequency 1.6 – 1MHz
   – Pulse length 4 ~ 200 ns